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晶圆

晶圆(Wafer)是指硅半导体集成电路制作所用的硅芯片,由于其形状为圆形,故称为晶圆。晶圆是生产集成电路所用的载体,一般意义晶圆多指单晶硅圆片。
晶圆是最常用的半导体材料,按其直径分为4英寸、5英寸、6英寸、8英寸等规格,近来发展出12英寸甚至研发更大规格(14英吋、15英吋、16英吋、……20英吋以上等)。晶圆越大,同一圆片上可生产的IC就越多,可降低成本;但对材料技术和生产技术的要求更高,例如均匀度等等的问题。一般认为硅晶圆的直径越大,代表着这座晶圆厂有更好的技术,在生产晶圆的过程当中,良品率是很重要的条件。

制造过程

二氧化硅矿石经由电弧炉提炼,盐酸氯化并经蒸馏后,制成了高纯度的多晶硅,其纯度高达99.999999999%,因在精密电子元件当中,硅晶圆需要有相当的纯度,不然会产生缺陷。晶圆制造厂再以柴可拉斯基法将此多晶硅熔解,再于溶液内掺入一小粒的硅晶体晶种,然后将其慢慢拉出,以形成圆柱状的单晶硅晶棒,由于硅晶棒是由一颗小晶粒在融熔态的硅原料中逐渐生成,此过程称为“长晶”。 硅晶棒再经过切片、研磨、抛光后,即成为集成电路工厂的基本原料——硅晶圆片,这就是“晶圆”。
很简单的说,单晶硅圆片由普通硅砂拉制提炼,经过溶解提纯蒸馏一系列措施制成单晶硅棒,单晶硅棒经过切片抛光之后,就成为了晶圆。
晶圆经多次掩膜处理,其中每一次的步骤包括感光剂涂布、曝光、显影、腐蚀、渗透、植入、刻蚀或蒸著等等,将其掩膜上的电路复制到层层晶圆上,制成具 有多层线路与元件的IC晶圆,再交由后段的测试、切割、封装厂,以制成实体的集成电路成品,从晶圆要加工成为产品需要专业精细的分工。
2吋、4吋、6吋、与8吋晶圆

著名晶圆厂商

只制造硅晶圆基片的厂商

例如合晶(台湾股票代号:6182)、中美晶(台湾股票代号:5483)、信越化学等。

晶圆制造厂

著名晶圆代工厂有台积电联华电子格罗方德(Global Fundries)及中芯国际等。英特尔(Intel)等公司则自行设计并制造自己的IC晶圆直至完成并行销其产品。三星电子等则兼有晶圆代工及自制业务。南亚科技瑞晶科技(现已并入美光科技,更名台湾美光内存)、Hynix美光科技(Micron)等则专于内存产品。日月光半导体等则为晶圆产业后段的封装、测试厂商。
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